Title:
TRANSMISSIVE DIFFRACTION GRATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/145186
Kind Code:
A1
Abstract:
[Problem] To provide a transmissive diffraction grating device that, while still achieving high shape accuracy, has a highly reliable structure in which a phase control layer is formed from an inorganic material. [Solution] A grating layer 2 formed on a transparent substrate 1 has a microstructure in which a grid 21 having a different refractive index from gaps 20 is disposed in a periodic manner. The grid 21 is formed from an inorganic material such as a silicon oxide, and the gaps 20 are cavities unfilled with material. On the opposite side of the grid 21 from the substrate 1, a translucent protective layer 3 that protects the grid 21 is provided. Parts 31 of the protective layer 3 cover the side surfaces of the grid 21, have a different refractive index from the gaps 20, and form the grating layer 2 together with the grid 21. Light incident to the grating layer 2 at an angle α of incidence emerges at an angle β of emergence due to diffraction.
Inventors:
YAJIMA DAISUKE (JP)
MATSUZAWA SATOSHI (JP)
MATSUZAWA SATOSHI (JP)
Application Number:
PCT/JP2020/048382
Publication Date:
July 22, 2021
Filing Date:
December 24, 2020
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G02B5/18
Domestic Patent References:
| WO2018105586A1 | 2018-06-14 |
Foreign References:
| JPH09297207A | 1997-11-18 | |||
| JP2003315518A | 2003-11-06 | |||
| JP2005517973A | 2005-06-16 | |||
| JP2018025748A | 2018-02-15 | |||
| JP2005099177A | 2005-04-14 | |||
| CN103376486A | 2013-10-30 |
Attorney, Agent or Firm:
HOTATE Koichi (JP)
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