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Patent Searching and Data


Title:
TRANSPORT DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/190174
Kind Code:
A1
Abstract:
Provided is a transport device (1) capable of suppressing skidding of a workpiece (W) levitated by a non-contact chuck (2). The transport device (1) comprises a plurality of ultrasonic transducers (3) that emit ultrasonic waves, in addition to the non-contact chuck (2) that levitates and holds the workpiece (W) in a non-contact manner. The plurality of ultrasonic transducers (3) are configured so as to emit ultrasonic waves to generate standing waves that attract the workpiece (W), and to hold the workpiece (W) in a position where the forces of attraction in a plurality of directions (X, Y) toward the outside of the workpiece (W) are balanced when viewed from the direction (Z) in which the non-contact chuck (2) faces the workpiece (W).

Inventors:
KIRKBY MICHAEL (JP)
MUNAKATA HIROSHI (JP)
ADACHI TAKUYA (JP)
Application Number:
PCT/JP2021/009036
Publication Date:
September 15, 2022
Filing Date:
March 08, 2021
Export Citation:
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Assignee:
YAMAHA ROBOTICS HOLDINGS CO LTD (JP)
International Classes:
B65G51/03; B65G49/06; H01L21/677
Domestic Patent References:
WO2009110552A12009-09-11
Foreign References:
JP2008227480A2008-09-25
JP2015216376A2015-12-03
JP2014003238A2014-01-09
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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