Title:
TRANSPORTATION HEAD FOR MICROCHIP TRANSFER DEVICE, MICROCHIP TRANSFER DEVICE HAVING SAME, AND TRANSFER METHOD THEREBY
Document Type and Number:
WIPO Patent Application WO/2020/040605
Kind Code:
A1
Abstract:
Disclosed are a transportation head for a microchip transfer device capable of minimizing mechanical and chemical damage to a microchip, a microchip transfer device having same, and a transfer method thereby. To this end, the transportation head for a microchip transfer device according to the present invention comprises: a head body having a pickup area and a dummy area; a first protruding pin disposed in the pickup area of the head body; and a liquid droplet attached to the first protruding pin.
Inventors:
KHANG DAHL-YOUNG (KR)
HWANG SUNG-HWAN (KR)
LEE JIA (KR)
YOON SUNG-SOO (KR)
CHOI SU SEOK (KR)
CHANG KISEOK (KR)
MOON JEONG MIN (KR)
JUNG SOON SHIN (KR)
RYU SUNGPIL (KR)
JUNG JIHWAN (KR)
HWANG SUNG-HWAN (KR)
LEE JIA (KR)
YOON SUNG-SOO (KR)
CHOI SU SEOK (KR)
CHANG KISEOK (KR)
MOON JEONG MIN (KR)
JUNG SOON SHIN (KR)
RYU SUNGPIL (KR)
JUNG JIHWAN (KR)
Application Number:
PCT/KR2019/010779
Publication Date:
February 27, 2020
Filing Date:
August 23, 2019
Export Citation:
Assignee:
LG DISPLAY CO LTD (KR)
International Classes:
H01L21/67; H01L21/677
Foreign References:
| KR101817703B1 | 2018-01-11 | |||
| JP5963374B2 | 2016-08-03 | |||
| JP2008177215A | 2008-07-31 | |||
| KR20120012225A | 2012-02-09 | |||
| JP2016157845A | 2016-09-01 |
Attorney, Agent or Firm:
DAE-A INTELLECTUAL PROPERTY CONSULTING (KR)
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