TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH CONCENTRIC INTERDIGITATED TRANSDUCER FINGERS

Title:

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH CONCENTRIC INTERDIGITATED TRANSDUCER FINGERS

Document Type and Number:

WIPO Patent Application WO/2022/236185

Kind Code:

A3

Abstract:

Acoustic resonator devices, filters, and methods. An acoustic resonator includes a substrate and a piezoelectric plate, a portion of the piezoelectric plate being a diaphragm spanning a cavity in the substrate. A conductor pattern on a front surface of the piezoelectric plate includes concentric interleaved interdigital transducer (IDT) fingers connected alternately to first and second busbars. The IDT fingers are on the diaphragm.

Inventors:

MCHUGH SEAN (US)
FENZI NEAL (US)
KOULAKIS JOHN (US)
DYER GREG (US)

Application Number:

PCT/US2022/028378

Publication Date:

January 12, 2023

Filing Date:

May 09, 2022

Export Citation:

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Assignee:

RESONANT INC (US)

International Classes:

G01N29/04; H03H9/02; H03B5/32; H03H3/02; H03H9/15

Foreign References:

US20210091749A1	2021-03-25
US20090114798A1	2009-05-07
US20210013860A1	2021-01-14
US20210067138A1	2021-03-04
US20180369816A1	2018-12-27
US20200083862A1	2020-03-12

Attorney, Agent or Firm:

MAIER, Paul, C. (US)

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