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Title:
TREATMENT DEVICE AND TREATMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2021/033999
Kind Code:
A1
Abstract:
Provided are a treatment device and a treatment method utilizing same, the treatment device comprising: a support part which is provided in the air and on which an object to be treated can be placed; a chamber part which is disposed on one side of the support part and has an open portion facing the object to be treated; a first discharging part, at least a portion of which is disposed in the chamber part; a second discharging part, at least a portion of which is disposed in the chamber part; an inspection part which is connected to the first and second discharging parts and inspects defects in the object to be treated; and a source supply part connected to the chamber part so as to be able to spray a source for depositing a thin film. The treatment device and the treatment method can inspect and repair the object to be treated provided in the air.

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Inventors:
SEONG MYUNG JUN (KR)
YE SE HUI (KR)
SONG EUN BEOM (KR)
BYUN IN JAE (KR)
LEE JONG SOO (KR)
Application Number:
PCT/KR2020/010707
Publication Date:
February 25, 2021
Filing Date:
August 13, 2020
Export Citation:
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Assignee:
CHARM ENG CO LTD (KR)
International Classes:
C23C16/52; C23C16/04; C23C16/453; G01N21/95; G01N23/22; G01N33/00
Foreign References:
KR20150022697A2015-03-04
KR20140047724A2014-04-22
KR20160134235A2016-11-23
KR20070007930A2007-01-16
US20190108971A12019-04-11
Attorney, Agent or Firm:
NAM, Seung-Hee (KR)
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