Title:
TREATMENT SOLUTION AND METHOD FOR TREATING OBJECT TO BE TREATED
Document Type and Number:
WIPO Patent Application WO/2021/044774
Kind Code:
A1
Abstract:
The present invention provides a treatment solution that, when used to treat an object to be treated that contains a cobalt-containing material, exhibits an excellent cleaning performance and provides an excellent smoothness for the object to be treated. Also provided is a method for treating the object to be treated. The treatment solution according to the present invention contains water, hydroxylamine, and three species of first anions consisting of Cl-, NO2
-, and NO3
-, wherein the total content of the first anions is 0.0001-30 parts by mass per 100 parts by mass of hydroxylamine.
More Like This:
Inventors:
SUGISHIMA YASUO (JP)
Application Number:
PCT/JP2020/029401
Publication Date:
March 11, 2021
Filing Date:
July 31, 2020
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
B08B3/08; C11D7/04; C11D7/08; C11D7/10; C11D7/16; C11D7/18; C11D7/26; C11D7/32; C11D7/34; C11D7/36; C11D7/50; C11D17/08; C23F1/28; C23G1/06; C23G1/10; C23G1/18; H01L21/304
Domestic Patent References:
| WO2017126554A1 | 2017-07-27 |
Foreign References:
| JP2012227291A | 2012-11-15 | |||
| JP2012009513A | 2012-01-12 |
Attorney, Agent or Firm:
ITOH Hideaki et al. (JP)
Download PDF:
Previous Patent: DISPLAY SYSTEM
Next Patent: METHOD FOR PREPARING STERILE INJECTABLE AGENT CONTAINING TERIPARATIDE OR SALT THEREOF
Next Patent: METHOD FOR PREPARING STERILE INJECTABLE AGENT CONTAINING TERIPARATIDE OR SALT THEREOF