Title:
TRENCH CAPACITOR AND TRENCH CAPACITOR MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/170825
Kind Code:
A1
Abstract:
Provided are a trench capacitor with which it is possible to improve yield, and a trench capacitor manufacturing method. The trench capacitor 1 comprises: a base material 10 which has an upper surface 10a, a lower surface 10b on the opposite side to the upper surface 10a, and a side surface 10c connecting the upper surface 10a and the lower surface 10b, and which is provided with a trench 11 extending in an up-down direction from the upper surface 10a; and an MIM structure 20 which includes a lower electrode layer 22, an upper electrode layer 23, and a dielectric layer 21 sandwiched between the lower electrode layer 22 and the upper electrode layer 23, and which is provided along the upper surface 10a and a wall surface defining the trench 11. A plurality of side surface scallops S are formed between the upper end and the lower end of the side surface 10c of the base material 10.
Inventors:
MASUDA HIDETOSHI (JP)
Application Number:
PCT/JP2020/004396
Publication Date:
August 27, 2020
Filing Date:
February 05, 2020
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
International Classes:
H01L21/301; H01G4/30; H01G4/33
Foreign References:
| JP2018195701A | 2018-12-06 | |||
| JP2008251972A | 2008-10-16 | |||
| JP2003158002A | 2003-05-30 |
Attorney, Agent or Firm:
MURAKOSHI Satoshi (JP)
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