TRIAXIAL SENSOR, SENSOR MODULE, AND ELECTRONIC DEVICE

WIPO Patent Application WO/2021/100697

A1

This triaxial sensor comprises: a first detection layer that has a first surface and a second surface on the reverse side from the first surface and comprises a capacitive first sensing unit; a second detection layer that has a first surface opposing the second surface of the first detection layer and comprises a capacitive second sensing unit; a first conductive layer that is provided so as to oppose the first surface of the first detection layer; a second conductive layer that is provided between the first detection layer and second detection layer; a separation layer that is provided between the first detection layer and second conductive layer and separates the first detection layer and second conductive layer; a first deformation layer that is provided between the first conductive layer and first detection layer and elastically deforms according to pressure acting in the thickness direction of the sensor; and a second deformation layer that is provided between the second conductive layer and second detection layer and elastically deforms according to pressure acting in the thickness direction of the sensor. The 25% CLD value of the separation layer is at least 10 times the 25% CLD value of the first deformation layer and at least 10 times the 25% CLD value of the second deformation layer.

TSUKAMOTO KEI (JP)
KOBAYASHI KEN (JP)
GOTO TETSURO (JP)
SAKAKURA YOSHIAKI (JP)

PCT/JP2020/042771

May 27, 2021

November 17, 2020

Click for automatic bibliography generation  

SONY CORP (JP)

G01L5/00; G01L5/165; G06F3/041; G06F3/044

WO2018061416A1

2018-04-05

JP2017156126A	2017-09-07
JP2010122018A	2010-06-03
US20190212844A1	2019-07-11

SUGIURA, Takuma et al. (JP)

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