Title:
TUNABLE OPTICAL FILTER
Document Type and Number:
WIPO Patent Application WO/2021/063013
Kind Code:
A1
Abstract:
A tunable optical filter (101). The tunable optical filter is a multi-cavity interference optical filter, has a transmission band within a wavelength range of 1200 nm to 1800 nm, and comprises a substrate (102) and an optical filter film layer plated on the surface of the substrate (102); the optical filter film layer comprises multiple cavity layers (104, 108) and reflective film stacks (103, 105, 107, 109) disposed on two end surfaces of the cavity layers (104, 108), and each reflective film stack (103, 105, 107, 109) comprises multiple high refractive index layers (103-2) and multiple low refractive index layers (103-1) alternately stacked, wherein the material for making the high refractive index layer (103-2) at least contains Si:H; the number of cavity layers of the optical filter (101) is greater than or equal to 3; the pass band of the optical filter (101) has a center wavelength, and when the working temperature range of the optical filter (101) partially overlaps a temperature range of 20 degrees Celsius to 85 degrees Celsius, the temperature drift coefficient of the center wavelength is greater than 70 pm/degrees Celsius and less than 300 pm/degrees Celsius. The optical filter can be obtained by one vacuum plating, avoiding the cumbersome processes of polishing silicon wafers and plating reflective films of two surfaces separately; a Si:H cavity layer having three cavities or more is easily implemented, and the optical filter has high rectangular degree.
Inventors:
LIU ZHE (CN)
LI YU (CN)
SU YAN (CN)
YU GUANGLONG (CN)
LI YU (CN)
SU YAN (CN)
YU GUANGLONG (CN)
Application Number:
PCT/CN2020/094170
Publication Date:
April 08, 2021
Filing Date:
June 03, 2020
Export Citation:
Assignee:
FUZHOU PHOTOP OPTICS CO LTD (CN)
International Classes:
G02B5/28
Foreign References:
| CN103777265A | 2014-05-07 | |||
| CN1516821A | 2004-07-28 | |||
| CN1864091A | 2006-11-15 | |||
| CN107111032A | 2017-08-29 | |||
| CN101803367A | 2010-08-11 | |||
| CN110109208A | 2019-08-09 | |||
| US20040008933A1 | 2004-01-15 | |||
| US20030048970A1 | 2003-03-13 |
Attorney, Agent or Firm:
FUZHOU JUNCHENG ZHISHICHANQUAN DAILI YOUXIANGONGSI (CN)
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