Title:
TUNER AND MICROWAVE PLASMA SOURCE
Document Type and Number:
WIPO Patent Application WO2010110256
Kind Code:
A1
Abstract:
A tuner (60), which automatically matches the impedance of a load within a chamber to the characteristic impedance of a microwave power source, is equipped with: a body (51), which forms one portion of a microwave transmission path, and which has both a tube-shaped outer conductor (52), and a tube-shaped inner conductor (53) provided within the outer conductor (52) along the same axis; annular slugs (61a, 61b) of a dielectric material, which are provided between the outer conductor (52) and the inner conductor (53), and which can move along the inner conductor in the longitudinal direction; and a drive mechanism that moves the slugs (61a, 61b). Slug moving axles (64a, 64b) and sliding members (63), which constitute the holding part, the drive guide part, and the drive transmission part of the drive mechanism are housed within the inner conductor (53).
Inventors:
KASAI SHIGERU (JP)
IKEDA TARO (JP)
OSADA YUKI (JP)
IKEDA TARO (JP)
OSADA YUKI (JP)
Application Number:
PCT/JP2010/054960
Publication Date:
September 30, 2010
Filing Date:
March 23, 2010
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
KASAI SHIGERU (JP)
IKEDA TARO (JP)
OSADA YUKI (JP)
KASAI SHIGERU (JP)
IKEDA TARO (JP)
OSADA YUKI (JP)
International Classes:
H01P5/04; H05B6/70; H05B6/72; H05H1/46
Domestic Patent References:
| WO2008013112A1 | 2008-01-31 |
Foreign References:
| JP2009502075A | 2009-01-22 | |||
| JP2006287817A | 2006-10-19 | |||
| JP2004007056A | 2004-01-08 | |||
| JPH10150306A | 1998-06-02 |
Attorney, Agent or Firm:
TAKAYAMA, HIROSHI (JP)
Hiroshi Takayama (JP)
Hiroshi Takayama (JP)
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