Title:
ULTRAPURE WATER MANUFACTURING SYSTEM AND ULTRAPURE WATER MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/199435
Kind Code:
A1
Abstract:
An ultrapure water manufacturing system according to an embodiment, which treats primary pure water, manufactures ultrapure water, and circulates the ultrapure water that has not been used at a point of use, is provided with: an ultraviolet-ray oxidation device for oxidative decomposition of organic carbon components included in the primary pure water; a mixed bed ion exchange resin device for eliminating ionic components arising because of the oxidative decomposition of the organic carbon components; and a concentration measuring device for measuring the concentration of hydrogen peroxide included in at least one of the primary pure water treated by the ultraviolet-ray oxidation device and the ultrapure water.
Inventors:
NOGUCHI YUKIO (JP)
AMAYA TORU (JP)
AMAYA TORU (JP)
Application Number:
PCT/JP2016/002818
Publication Date:
December 15, 2016
Filing Date:
June 10, 2016
Export Citation:
Assignee:
NOMURA MICRO SCIENCE KK (JP)
International Classes:
C02F1/32; B01J39/04; B01J39/18; B01J41/04; B01J41/12; B01J47/04; C02F1/42; G01N31/00
Domestic Patent References:
| WO2009122884A1 | 2009-10-08 |
Foreign References:
| JPH0662894A | 1994-03-08 | |||
| JP2013013347A | 2013-01-24 | |||
| JP2013237944A | 2013-11-28 | |||
| JPH10123118A | 1998-05-15 | |||
| JP2002263643A | 2002-09-17 | |||
| JP2008173617A | 2008-07-31 | |||
| JP2012061443A | 2012-03-29 | |||
| JP2009112941A | 2009-05-28 | |||
| JP4219664B2 | 2009-02-04 | |||
| JPH0889938A | 1996-04-09 |
Attorney, Agent or Firm:
SAKURA PATENT OFFICE, p. c. (JP)
Patent business corporation cherry tree international patent firm (JP)
Patent business corporation cherry tree international patent firm (JP)
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