Title:
ULTRAPURE WATER PRODUCTION DEVICE AND ULTRAPURE WATER PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/161569
Kind Code:
A1
Abstract:
The present invention inexpensively, stably, and reliably produces ultrapure water of high purity that sufficiently meets water quality requirements, regardless of variation in the amount and quality of the water, while also achieving a reduced device installation area. An ultrapure water production device provided with: a pretreatment system that treats raw water; a primary water purification system that treats the water treated by the pretreatment system; and a subsystem that treats the water treated by the primary water purification system. The primary water purification system comprises, as constituent devices, at least a reverse osmosis membrane separation device, a degassing device, an ultraviolet oxidation device, and an ion exchange device in this order. The ultrapure water production device has a monitor that monitors the amount and/or quality of the water in the primary water purification system and a control means that controls operation conditions of one or more of the constituent devices according to a value detected by the monitor.
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Inventors:
IDA JUNICHI (JP)
MINATO YASUHARU (JP)
MINATO YASUHARU (JP)
Application Number:
PCT/JP2020/034827
Publication Date:
August 19, 2021
Filing Date:
September 15, 2020
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
B01D61/08; C02F1/20; C02F1/32; C02F1/42; C02F1/469; C02F9/02; C02F9/04; C02F9/06; C02F9/08; C02F9/12
Foreign References:
| JP2016117001A | 2016-06-30 | |||
| JPH10180254A | 1998-07-07 | |||
| JP2018079447A | 2018-05-24 | |||
| JP2012205989A | 2012-10-25 |
Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
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