Title:
ULTRAPURE WATER PRODUCTION SYSTEM AND ULTRAPURE WATER PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/241476
Kind Code:
A1
Abstract:
The purpose of the invention is to further reduce fine particles contained in ultrapure water to be supplied to a point of use. An ultrapure water production system 1 has: an ultrapure water supply line L1 that is connected to points of use UP1 ~ UP3 and through which ultrapure water flows; and a first ion exchange device 6, membrane filtration device 8, and second ion exchange device 9 that are disposed in series on the ultrapure supply line L1. At least some of the ultrapure water filtered by the membrane filtration device 8 is processed by the second ion exchange device 9 before being supplied to the points of use UP1 ~ UP3.
Inventors:
ICHIHARA FUMITAKA (JP)
KONDO TSUKASA (JP)
SUGAWARA HIROSHI (JP)
HASHIMOTO KOICHIRO (JP)
KONDO TSUKASA (JP)
SUGAWARA HIROSHI (JP)
HASHIMOTO KOICHIRO (JP)
Application Number:
PCT/JP2020/020247
Publication Date:
December 03, 2020
Filing Date:
May 22, 2020
Export Citation:
Assignee:
ORGANO CORP (JP)
International Classes:
B01J39/05; B01J39/18; B01J41/05; B01J41/12; B01J47/04; B01J49/09; B01J49/53; B01J49/57; B01J49/60; C02F1/42; C02F1/44
Foreign References:
| JP2003145148A | 2003-05-20 | |||
| JP2016107249A | 2016-06-20 | |||
| JP2010234356A | 2010-10-21 | |||
| JPH04108588A | 1992-04-09 | |||
| JPH04161290A | 1992-06-04 |
Attorney, Agent or Firm:
MIYAZAKI Teruo et al. (JP)
Download PDF: