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Title:
ULTRAPURE WATER PRODUCTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/209285
Kind Code:
A1
Abstract:
An ultrapure water production system capable of producing ultrapure water from which fine particles have been removed to a high degree and supplying the water to a point of use (POU) is equipped with at least an ultrafiltration membrane device (16) and has a first organic porous ion exchanger (32) provided at a position downstream of the ultrafiltration membrane device (16) in an ultrapure water supply line that supplies ultrapure water to the point of use, and a precision filtration membrane device (35) provided at a position downstream of the first organic porous ion exchanger (32) in the ultrapure water supply line.

Inventors:
TSUTANO KYOHEI (JP)
ICHIHARA FUMITAKA (JP)
SUDO FUMIO (JP)
Application Number:
PCT/JP2022/004467
Publication Date:
October 06, 2022
Filing Date:
February 04, 2022
Export Citation:
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Assignee:
ORGANO CORP (JP)
International Classes:
B01D61/58; B01D69/00; C02F1/42; C02F1/44
Domestic Patent References:
WO2019221187A12019-11-21
WO2014178289A12014-11-06
Foreign References:
JP2019195763A2019-11-14
JP2016097389A2016-05-30
Attorney, Agent or Firm:
MIYAZAKI Teruo et al. (JP)
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