ULTRASONIC SENSOR AND MANUFACTURING METHOD THEREFOR, AND DISPLAY DEVICE

WIPO Patent Application WO/2019/228198

A1

Disclosed are an ultrasonic sensor and a manufacturing method therefor, and a display device. The ultrasonic sensor comprises: a substrate (10) and at least one sensor assembly (20) located on the substrate (10), wherein the sensor assembly (20) comprises: a first electrode (21), a second electrode (23), and a piezoelectric layer (22) located between the first electrode (21) and the second electrode (23); one side, close to the sensor assembly (20), of the substrate (10) is provided with a groove (11); and there exists an overlapping portion between an orthographic projection of the piezoelectric layer (22) on the substrate (10) and a region of the groove (11) on the substrate (10). By means of providing the groove (11) in a region, located below the piezoelectric layer (22), of the substrate (10), the absorption of the substrate (10) for a mechanical vibration signal generated by the ultrasonic sensor under the excitation of an alternating-current electrical signal can be reduced, and the quality of an ultrasonic signal can be ensured, thereby improving the sensitivity of the ultrasonic sensor.

LIU LIBIN (CN)
YANG QIAN (CN)

PCT/CN2019/087453

December 05, 2019

May 17, 2019

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BOE TECHNOLOGY GROUP CO LTD (CN)

G01D5/48; G06K9/00; H01L41/08

CN108955736A	2018-12-07
CN107145858A	2017-09-08
CN107145858A	2017-09-08
CN106250834A	2016-12-21
CN206546583U	2017-10-10
CN205983304U	2017-02-22
US20170364726A1	2017-12-21

LIU, SHEN & ASSOCIATES (CN)

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