Title:
ULTRASONIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2019/065182
Kind Code:
A1
Abstract:
A fixed frame (2) is fixed to an external member. An ultrasonic oscillation unit (3) is constituted by a first substrate arranged inside the fixed frame (2) and having flexibility and a first piezoelectric element formed on the first substrate by thin film deposition, the ultrasonic oscillation unit (3) generating an ultrasonic wave by being bent due to expansion/contraction of the first piezoelectric element. An actuator unit (4) is constituted by a second substrate connecting between the first substrate and the fixed frame (2) and having flexibility and a second piezoelectric element formed on the second substrate by thin film deposition, the actuator unit (4) causing the ultrasonic oscillation unit (3) to be oscillated relative to the fixed frame (2) by being bent due to expansion/contraction of the second piezoelectric element. The first substrate and second substrate of the fixed frame (2) are composed of the same substrate.
Inventors:
OGATA KENJI (JP)
KUROGI SHOGO (JP)
KUROGI SHOGO (JP)
Application Number:
PCT/JP2018/033437
Publication Date:
April 04, 2019
Filing Date:
September 10, 2018
Export Citation:
Assignee:
DAI ICHI SEIKO CO LTD (JP)
International Classes:
H04R17/00; B81B3/00; H01L41/09; H01L41/113; H01L41/187
Foreign References:
| JP2001149372A | 2001-06-05 | |||
| JP2017003717A | 2017-01-05 | |||
| JP2013003583A | 2013-01-07 | |||
| JP2017167254A | 2017-09-21 | |||
| JPH10256570A | 1998-09-25 | |||
| JP2017185756A | 2017-10-12 |
Other References:
See also references of EP 3691293A4
Attorney, Agent or Firm:
KIMURA Mitsuru (JP)
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