Title:
ULTRASONIC TRANSDUCER, METHOD FOR MANUFACTURING SAME, AND ULTRASONIC IMAGE PICKUP DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/061395
Kind Code:
A1
Abstract:
This ultrasonic transducer has: a hollow section 110, which is formed between insulating films 104, 106 sandwiched between a lower electrode 103 and an upper electrode 107 that are formed on a substrate 101; and a membrane 120 comprising insulating films 106, 108, 111, 112 and the upper electrode 107, which are above the hollow section 110, said membrane vibrating when transmitting and receiving ultrasonic waves. Furthermore, the hollow section 110 has a cross-sectional shape satisfying the relationship of h1>h2>0, where h1 represents the thickness of a center portion, and h2 represents the thickness of an outer peripheral portion.
Inventors:
HASEGAWA HIROAKI (JP)
MACHIDA SHUNTARO (JP)
TAKEZAKI TAIICHI (JP)
RYUZAKI DAISUKE (JP)
MACHIDA SHUNTARO (JP)
TAKEZAKI TAIICHI (JP)
RYUZAKI DAISUKE (JP)
Application Number:
PCT/JP2017/024949
Publication Date:
April 05, 2018
Filing Date:
July 07, 2017
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
H04R19/00; A61B8/14; H04R31/00
Domestic Patent References:
| WO2013065365A1 | 2013-05-10 |
Foreign References:
| JP2009055474A | 2009-03-12 | |||
| JP2016072661A | 2016-05-09 | |||
| JP2015142140A | 2015-08-03 | |||
| US20110068654A1 | 2011-03-24 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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