Title:
ULTRAVIOLET IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/152331
Kind Code:
A1
Abstract:
Provided is a small ultraviolet irradiation device which can emit ultraviolet rays in a highly efficient manner. Specifically disclosed is an ultraviolet irradiation device, wherein a container, which is hermetically sealed so that the interior thereof has a negative pressure and which has an ultraviolet ray transmissible window, is provided with a semiconductor multilayer film element and an electron beam irradiation source which irradiates the semiconductor multilayer film element with an electron beam. The semiconductor multilayer film element is provided with an active layer having a single quantum well structure or a multiple quantum well structure formed from InxAlyGa1-x-yN (wherein 0≤x<1, 0
Inventors:
KAWAKAMI YOICHI (JP)
FUNATO MITSURU (JP)
OTO TAKAO (JP)
BANAL RYAN GANIPAN (JP)
YAMAGUCHI MASANORI (JP)
KATAOKA KEN (JP)
HATA HIROSHIGE (JP)
FUNATO MITSURU (JP)
OTO TAKAO (JP)
BANAL RYAN GANIPAN (JP)
YAMAGUCHI MASANORI (JP)
KATAOKA KEN (JP)
HATA HIROSHIGE (JP)
Application Number:
PCT/JP2011/062322
Publication Date:
December 08, 2011
Filing Date:
May 30, 2011
Export Citation:
Assignee:
UNIV KYOTO (JP)
USHIO ELECTRIC INC (JP)
KAWAKAMI YOICHI (JP)
FUNATO MITSURU (JP)
OTO TAKAO (JP)
BANAL RYAN GANIPAN (JP)
YAMAGUCHI MASANORI (JP)
KATAOKA KEN (JP)
HATA HIROSHIGE (JP)
USHIO ELECTRIC INC (JP)
KAWAKAMI YOICHI (JP)
FUNATO MITSURU (JP)
OTO TAKAO (JP)
BANAL RYAN GANIPAN (JP)
YAMAGUCHI MASANORI (JP)
KATAOKA KEN (JP)
HATA HIROSHIGE (JP)
International Classes:
H01J63/06; B82Y20/00; H01L33/06
Foreign References:
| JP2001251001A | 2001-09-14 | |||
| JP2001237455A | 2001-08-31 | |||
| JPH02188980A | 1990-07-25 | |||
| JP2006190541A | 2006-07-20 | |||
| JPH05218589A | 1993-08-27 | |||
| JP2007294698A | 2007-11-08 | |||
| JP3667188B2 | 2005-07-06 |
Other References:
See also references of EP 2579295A4
Attorney, Agent or Firm:
OHI, Masahiko (JP)
Masahiko Oi (JP)
Masahiko Oi (JP)
Download PDF:
Claims: