Title:
ULTRAVIOLET STERILIZATION DEVICE, ULTRAVIOLET STERILIZATION METHOD, AND ULTRAPURE WATER MANUFACTURING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2017/221733
Kind Code:
A1
Abstract:
Provided are an ultraviolet sterilization device, ultraviolet sterilization method, and ultrapure water manufacturing system that can effectively sterilize water retained in small spaces in branched pipe connections and the like. The ultraviolet sterilization device is provided with: a main pipe 13a forming a flow path for water to be treated; a branch pipe 13b connected to the main pipe 13a; a lens 12 attached water-tightly in a position in the main pipe 13 facing an opening of a connection for the branch pipe 13b; and an ultraviolet irradiation device 1 having an ultraviolet light emitting diode 11, which discharges ultraviolet rays having an emission peak wavelength of 230 - 290 nm, as a light source. The ultraviolet light emitting diode 11 is disposed with the light discharge surface 11a thereof facing the lens 12 side on the back surface side of the lens 12, and the lens 12 has optical characteristics for diffusing or converging the ultraviolet rays such that a prescribed amount of the ultraviolet rays emitted from the light source of the ultraviolet irradiation device 1 irradiate the inside of the opening of the branch pipe 13b.
Inventors:
AMAYA TORU (JP)
Application Number:
PCT/JP2017/021347
Publication Date:
December 28, 2017
Filing Date:
June 08, 2017
Export Citation:
Assignee:
NOMURA MICRO SCIENCE KK (JP)
International Classes:
C02F1/32; B01J47/04; C02F1/42; H01L33/00
Domestic Patent References:
| WO2017043355A1 | 2017-03-16 |
Foreign References:
| JPS61111189A | 1986-05-29 | |||
| JP2014233712A | 2014-12-15 | |||
| JP2013255864A | 2013-12-26 | |||
| JP2016123930A | 2016-07-11 |
Attorney, Agent or Firm:
SAKURA PATENT OFFICE, P.C. (JP)
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