UP-TO-STANDARD CHECKING METHOD AND UP-TO-STANDARD CHECKING SYSTEM FOR ADDED DETECTION TOOL

WIPO Patent Application WO/2022/052696

A1

An up-to-standard checking method and an up-to-standard checking system for an added detection tool. The method comprises: after several wafers to be detected are provided (S21), detecting some of said wafers in a new detection tool to obtain several pieces of first detection data (S22); detecting some of said wafers in an old detection tool to obtain several pieces of second detection data (S23); performing data analysis on the several pieces of first detection data and the several pieces of second detection data to obtain an attributed category corresponding to the several pieces of first detection data and the several pieces of second detection data (S25); and determining whether the first detection data corresponding to each attributed category of the new detection tool is up to standard (S26). By means of the checking method, the up-to-standard checking process of the added new detection tool is standardized and process-oriented, the accuracy of the up-to-standard checking result of the new detection tool is improved, and the efficiency of the up-to-standard checking process of the new detection tool is improved.

CHEN YUI-LANG (CN)

PCT/CN2021/110889

March 17, 2022

August 05, 2021

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CHANGXIN MEMORY TECH INC (CN)

G01R35/00

WO2014081897A1

2014-05-30

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CN106093831A	2016-11-09
CN101718850A	2010-06-02
CN104677222A	2015-06-03
CN110431431A	2019-11-08
JPH03175317A	1991-07-30

BEIJING LINKAW PATENT ATTORNEY LAW FIRM (CN)

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