Title:
UPPER DOME FOR SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/287155
Kind Code:
A1
Abstract:
The present invention relates to a substrate processing apparatus comprising: a chamber in which a processing process on substrates is performed; a substrate supporting part for supporting at least one substrate inside the chamber; an upper dome covering the upper portion of the chamber; and a lower dome coupled to the lower portion of the chamber, wherein the edge portion of the upper dome is thicker than the central portion of the upper dome.
Inventors:
WOO RAM (KR)
KIM KI BUM (KR)
KIM DO HYUNG (KR)
KIM JAE HONG (KR)
AHN MIN (KR)
KIM KI BUM (KR)
KIM DO HYUNG (KR)
KIM JAE HONG (KR)
AHN MIN (KR)
Application Number:
PCT/KR2022/010106
Publication Date:
January 19, 2023
Filing Date:
July 12, 2022
Export Citation:
Assignee:
JUSUNG ENG CO LTD (KR)
International Classes:
C23C16/00; C30B25/08; H01J37/32
Foreign References:
| KR19980081271A | 1998-11-25 | |||
| KR20190050650A | 2019-05-13 | |||
| JP2003124206A | 2003-04-25 | |||
| US20140199056A1 | 2014-07-17 | |||
| US20180355510A1 | 2018-12-13 |
Attorney, Agent or Firm:
ASTRAN INT'L IP GROUP (KR)
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