The present invention relates to a vacuum chamber and a vacuum system.

To connect equipment, such as vacuum pumps or gauges, to a vacuum chamber, particularly in ultrahigh vacuum (UHV) or extreme high (XHV) systems, generally the convention is to use tubular pipework and standard flanges.

The tubular pipework is typically arranged radially outwards from the main chamber. In this arrangement the connection interface between the equipment and the main chamber is limited and particularly corresponds to the cross- sectional area of the tubing. This limitation generally leads to a limited exchange, particularly gas exchange, between the equipment and the main chamber.

In addition, tubing generally extending longitudinally from the main chamber results in a restriction on the arrangement of the equipment relative to the main chamber. Usually, the equipment is arranged longitudinally relative to the main chamber. If the equipment is to be arranged differently, for example, in a width direction, relative to the main chamber, additional tubing, such as T-pieces, are required. These additional elements and/or the general design in the prior art leads to an increased distance of the equipment from the main chamber.

Non-evaporable getter (NEG) pumps, ion getter (IGP) pumps and NEG-IGP combination (NEG-IGP) pumps are often connected to vacuum chambers, particularly UHV or XHV chambers. These NEG, IGP and NEG-IGP pumps generally comprise a radially arranged pump array. If these pumps cannot be inserted directly into the main chamber, for example due to lack of space, a tubing connection is required. In view of that, tubes are typically connected longitudinal to the chamber. If a radial gas exchange between the pump and the main chamber is desired a T-piece connection can be implemented to achieve a radial arrangement relative to the main chamber.

A disadvantage of the prior art arrangement is therefore a limited exchange, in particular gas exchange, between the equipment and the main chamber. Alternatively, or in addition, complex tubing is required, particularly to implement a preferred relative arrangement of components. Alternatively, or in addition, a further disadvantage in the state of the art is an increased distance between the equipment and the main chamber.

Thus, it is an object of at least the preferred embodiments of the present invention to provide a vacuum chamber and a vacuum system having an improved gas exchange between connectable equipment and the main chamber.

The object is solved by a vacuum chamber according to claim 1 and a vacuum system according to claim 12.

The vacuum chamber is preferably a UHV or XHV vacuum chamber. The vacuum chamber preferably comprises a housing having a housing shell, and a tube having a tube shell, wherein the housing shell is connected to the tube shell.

The tube is preferably configured to connect equipment, such as a vacuum pump, for example a non-evaporable getter (NEG) pump or an ion getter (IGP) pump or an NEG-IGP combination (NEG-IGP) pump, and/or a gauge, to the housing. Preferably, the tube is arranged to receive this equipment, and preferably forms a secondary chamber for receiving this equipment.

The housing is configured to house at least one object, such as a quantum computer. Preferably, the housing forms a main or core chamber for receiving the at least one object, and which in use is evacuated by the vacuum pump. The main chamber preferably corresponds to a space which is enclosed by the housing. The tube shell is connected to the housing shell in such a way that the tube shell intersects with the housing shell.

A side surface of the tube shell intersects with a side surface of the housing shell. It is preferred that a central section of the tube shell intersects with the housing shell. The central section of the tube shell preferably intersects a central section of the housing. It is thus preferred that a base of the tube is nonintersecting with the housing. A base of the tube preferably corresponds to an end of the tube.

The secondary chamber preferably corresponds to a space which is enclosed by the tube. The tube is preferably connected to the housing so that the main chamber overlaps with the secondary chamber, whereby an overlapping space is formed. This overlapping space is located within both the main chamber and the secondary chamber.

Preferably the tube is configured to receive a vacuum pump, such as a NEG pump or an IGP pump or an NEG-IGP pump, and/or a gauge. Preferably, the tube is connected to the housing in such a way that a vacuum pump or a gauge received within the tube extends into the housing. An advantage of the intersecting connection is that the shape and/or size of the interface between the tube and the main chamber, which is the opening through which gas passes, can be altered. Furthermore, the distance and/or the orientation of equipment relative to the main chamber can be altered. For example, if a vacuum pump is arranged in the tube, the transmission probability molecular conductance and/or net pumping speed can be increased, whereby the pumping capacity is improved.

The intersection between the tube and the housing defines an interface. The interface provides an opening or aperture, particularly a gas exchange opening or aperture, between the tube and the housing. This interface between the tube and the housing defines an intersection surface between the tube and the housing, and a cross-sectional area of the intersection between the tube and the housing and/or to a two-dimensional projection of the intersection between the tube and the housing. The cross-sectional area of the intersection may be selected, by way of controlling the extent to which the tube intersects with the housing, to improve or restrict gas flow. It is thus preferred that the interface between the tube and the housing is larger or smaller than the cross-sectional area of the tube. The cross-sectional area of the tube is preferably parallel to a base of the tube and/or orthogonal to a center or longitudinal axis of the tube. The cross-sectional area of the intersection between the tube and the housing is preferably arranged in a plane which is at 90° to the cross-sectional area of the tube. The cross-sectional area of the intersection between the tube and the house preferably has two-fold rotational symmetry and is preferably oval in shape.

Preferably, an axis of the tube is skew with an axis of the housing. In other words, the axis of the tube is preferably non-intersecting with the axis of the housing or a center point of the housing and is preferably non-parallel with the axis of the housing. The axis of the tube is a center or longitudinal axis of the tube. Depending on the shape of the tube, the axis of the tube may be a symmetrical, preferably a rotationally symmetrical, axis of the tube. The axis of the housing is a center or longitudinal axis of the housing. Depending on the shape of the tube, the axis of the housing may be a symmetrical, preferably a rotationally symmetrical, axis of the housing. Preferably, said axis of the tube is arranged at 90° to said axis of the housing.

Preferably, the tube intersects the housing by at least 5% of the width of the tube, preferably by at least 10% of the width of the tube, more preferably by at least 20% of the width of the tube. The tube may intersect the housing further, for example by at least 30% of the width of the tube or by at least 50% of the width of the tube. In view of that it is thus preferably implemented that the tube overlaps radially with the housing by the corresponding percentage.

Preferably, the housing has a hollow cylindrical shape having a cylindrical shell and a circular cross-section. Alternatively, the housing may have an ellipsoid shape with an ellipsoid shell and an elliptical cross-section orthogonal to the center axis of the housing. Alternatively, the housing may have a spherical shape with a spherical shell. As a further alternative the housing may have a cuboid shape having a rectangular cross-section. The housing may have two base surfaces, at least one of which may be open or closed.

Preferably, the tube has a hollow cylindrical shape having a cylindrical shell and a circular cross-section. Alternatively, the tube may have an ellipsoid shape with an ellipsoid shell and an elliptical cross-section orthogonal to the center axis of the tube. As a further alternative the tube may have a cuboid shape having a rectangular cross-section, or the tube may have a polygonal cross-section. The tube may have two base surfaces, at least one of which may be open or closed.

A first base and/or a second base of the tube may comprise a connector. The connector preferably comprises a flange. The connector is preferably configured for connecting a vacuum pump, such as a NEG pump or an IGP or an NEG-IGP pump, a gauge and/or a closure to the tube. Particularly, the connector is configured to receive a vacuum pump, such as a NEG pump or an IGP or an NEG-IGP pump, and/or a gauge into the tube.

Preferably, the tube comprises a vacuum pump, particularly a NEG pump or an IGP or an NEG-IGP pump. The vacuum pump is preferably arranged inside the housing. Preferably, at least part of the vacuum pump, for example a pump array of the vacuum pump, particularly an NEG array or an IGP array or an NEG- IGP array, is located within the housing, preferably within the main chamber. Preferably, the vacuum chamber comprises at least one flange connector connected, particularly directly connected, to the housing, preferably to the shell of the housing. The flange connector preferably has a tubular shape with a flange at a first end and a connection interface at a second end, whereby the connection interface is, preferably integrally, connected to the housing. The interface between the flange connector and the housing preferably has the same size as the cross-sectional area of the flange connector.

Preferably, an axis of the flange connector intersects with the axis of the housing, preferably with the center point of the housing. The axis of the flange connector is preferably a center or longitudinal axis of the flange connector. Depending on the shape of the flange connector, the axis of the flange connector may be a symmetrical, preferably a rotationally symmetrical, axis of the flange connector. The axis of the flange connector is preferably orthogonal to said axis of the housing.

Preferably, the axis of the flange connector intersects with the axis of the tube. The axis of the flange connector is preferably orthogonal to the axis of the tube.

The flange connector preferably has a cylindrical shape. Alternatively, the flange connector may have a tapering shape, such as a conical or pyramidical, shape.

Preferably the tube is integrally connected to the housing. The tube may be bonded or welded to the housing.

Instead of the intersecting connection of the tube shell and the housing shell, the tube can be connected to the housing by its base. The tube preferably has a tapering shape, such as a conical or pyramidical shape. The diameter and/or the cross section of the conical or pyramidical shaped tube preferably increases or decreases outwardly from the connection to the housing. The conical or pyramidical shape of the tube advantageously allows for an altered, particularly increased or decreased, gas flow between the vacuum chamber and the tube. If the tube has a conical or pyramidical shape and a base of the tube is connected to the housing, the other base of the tube may comprise a flange.

In view of this, the present invention also provides a vacuum chamber, particularly a UHV or XHV vacuum chamber, comprising a housing and a tube connected to the housing, wherein the tube has a tapering, preferably conical or pyramidical, shape. Preferably, a vacuum pump, particularly a NEG or an IGP or an NEG-IGP pump, is arranged within the tapering tube. Preferably, a quantum computer is arranged within the housing. Preferably, the tapering tube is integrally connected, preferably materially bonded, more preferably welded, to the housing

The vacuum system is preferably a UHV or XHV vacuum system comprising a vacuum pump, particularly a NEG pump or an IGP or an NEG-IGP pump, connected to the tube of the vacuum chamber. Preferably the vacuum pump is arranged within the tube. The vacuum pump is preferably arranged such that it is located at least partially within the housing.

Preferably a turbomolecular pump and/or a gauge, preferably an ion gauge, and/or a window and/or an objective lens and/or a helium connection is preferably connected to a respective flange connector.

Preferably, a quantum computer, preferably a trapped ion quantum computer, is arranged inside the housing, particularly inside the main chamber.

Preferred features of the present invention will now be described, purely by way of example, with reference to the accompanying drawings, in which:

Figure 1 is a schematical, perspective view of a vacuum chamber, and Figure 2 is a side sectional view along line II-II in figure 1.

Similar or identical elements are identified in the figures with the same reference signs. For improved clarity, in particular elements that have already been identified are generally not given reference signs in all figures.

Figure 1 shows a vacuum chamber 10 comprising a housing 12. The housing 12 is preferably cylindrical. The housing 12 forms a main chamber 20 or core chamber within a housing shell 14 to accommodate an object (not shown), such as a quantum computer. A first base 11 and a second base 13 of the housing 12 are preferably closed. These closures are preferably integrally formed with the housing shell 14. Alternatively, the first base 11 and/or second base 13 may be open and comprise a flange.

A flange connector 26 is connected to the housing shell 14. The flange connector 26 provides a standard connection for connecting equipment to the vacuum housing 12. A first base 36 of the flange connector 26 comprises a flange 29. A second base 38 of the flange connector 26 is connected to the housing shell 14 by a tubing 28 having a tubing shell 27. The tubing 28 is preferably cylindrical. The tubing 28 is connected to, and is preferably integral with, the housing shell 14.

An axis 34 of the tubing 28, particularly of the flange connector 26, is arranged orthogonally to an axis 30 of the housing 12. Furthermore, the axis 34 intersects the axis 30. The axis 34 is a center, or longitudinal, axis of the tubing 28. The axis 30 is a center, or longitudinal, axis of the housing 12. Preferably, the axis 34 intersects a center point 33 of the housing 12.

A tube 16 is connected to the housing 12. The tube 16 is preferably located on the opposite side of the housing 12 to the flange connector 26. The tube 16 is preferably cylindrical. The tube 16 comprises a tube shell 18 which is connected to the housing shell 14 such that the tube shell 18 intersects the housing shell 14. The tube shell 18 is connected to the housing shell 14 such that neither a first base 40 nor a second base 42 of the tube 16 is connected to and/or intersecting with the housing shell 14. Instead, the tube shell 18 is connected to the housing shell 14 by a side wall of the tube 16. A central section of the tube shell 18 is preferably connected to a central section of the housing shell 14. The tube 16 is arranged such that an axis 32 of the tube 16 is skew to the axis 30 of the housing 12, so that the axis 32 is non-intersecting with the axis 30 and the center point 33 of the housing 12, and so that the axis 32 is nonparallel with the axis 30 of the housing 12. Axis 32 corresponds to a center, or longitudinal, axis of the tube 16. The axis 32 is preferably arranged at 90° to the axis 30 of the housing 12. The axis 34 of the tubing 28 is preferable coplanar with the axis of the tube 16. The axis 34 of the tubing 28 preferably intersects the axis 32 of the tube 16, preferably so that the axis 34 of the tubing 28 is orthogonal to the axis 32 of the tube 16.

By way of this connection, a secondary chamber 21 of the tube 16 intersects and overlaps with the main chamber 20 of the housing 12.

It is preferred that the housing shell 14 and the tube shell 18 are connected by welding, particularly by forming a welding seam 24 between the housing shell 14 and the tube shell 18. On the other hand, the housing shell 14 may be integrally connected to the tube shell 18. It is possible to manufacture the housing 12 and the tube 16 integrally via molding and/or 3d-printing.

The flange connector 26 and/or the tube 16 are adapted to attach equipment such as a gauge and/or a vacuum pump, particularly a NEG pump or an IGP or an NEG-IGP pump, to the main chamber 20. Preferably, flange connector 26 and/or the tube 16 is shaped so that equipment can be inserted into the flange connector 26 and/or the tube 16. The connection between the tube 16 and the housing 12 is arranged so that a pump, particularly a NEG pump or an IGP or an NEG-IGP pump, inserted into the tube 16, preferably exclusively, extends into the main chamber 20, in particular in such a way that the pump array is arranged frontal to the main chamber 20.

Tube 16 is closed off at the second base 42 of the tube 16. However, alternatively the second base 42 may be open and comprise a flange, similar to flange 22 provided at the first base 40 of the tube 16.

The flange connector 26 as shown in figure 1 has a cylindrical shape. Alternatively, the flange connector may have a tapering, conical or pyramidical shape. Preferably this tapering shape tapers outwardly in the direction of the housing 12.

Figure 2 shows a side sectional view along line II-II in figure 1. Thus, a section through the tube 16 is shown from the right, so that the interface 25 between the tube 16 and the housing 12 as well as (partly) the interface 39 between the flange connector 26 and the housing 12 can be seen. In this embodiment, the tube 16 and the flange connector 26 have the same inner diameter.

As shown, the interface 25, particularly the intersection area, between the tube 16 and the housing 12 is oval and has a larger area than the circular interface 39 between the flange connector 26 and the housing 12. Thus, a higher gas exchange between the tube 16 and the housing 12 is possible in comparison to the gas exchange between the flange connector 26 and the housing 12. Furthermore, the intersecting interface 25 between the tube 16 and the housing 12 is larger than the cross-sectional area of the tube 16.

In summary, a vacuum chamber 10 includes a housing 12 comprising a main chamber 20 and a tube 16 connected to the housing 12 for receiving a vacuum pump. A side wall of the tube 16 intersects a side wall of the housing 12 to define an interface through which, in use, gas passes between the housing 12 and the tube 16.