Title:
VACUUM CONDITION CONTROLLING APPARATUS, SYSTEM AND METHOD FOR SPECIMEN OBSERVATION
Document Type and Number:
WIPO Patent Application WO/2018/094903
Kind Code:
A1
Abstract:
A vacuum condition controlling apparatus (104), the top of which is connected with an electron beam generating instrument. The apparatus is rotationally symmetric, comprises the following parts deployed outward from the central axis: the central channel (113), the first pumping channel (107), the gas supplying chamber (106) and the at least one pumping chamber (108). A pressure limiting aperture (109) is deployed near the outlet of the central channel (113), for keeping the pressure difference between the central channel (113) and the outside environment, and allow the electron beam to go through the central channel (113); the first pumping channel (107) is connected to the central channel (113) to pump the central channel (113); the top of the gas supplying chamber (106) is connected to the gas supplying channel (106) to supply gas to the area (114) between the specimen (111) and the apparatus; the top of the second pumping channel is connected to the second pumping channel, to pump the area (114).
Inventors:
HE WEI (CN)
LI SHUAI (CN)
LI SHUAI (CN)
Application Number:
PCT/CN2017/075465
Publication Date:
May 31, 2018
Filing Date:
March 02, 2017
Export Citation:
Assignee:
FOCUS EBEAM TECH BEIJING CO LTD (CN)
International Classes:
G01N23/22; H01J37/02
Foreign References:
| CN1039324A | 1990-01-31 | |||
| EP2672504A2 | 2013-12-11 | |||
| US20080035861A1 | 2008-02-14 | |||
| US20100230590A1 | 2010-09-16 | |||
| US5362964A | 1994-11-08 | |||
| US20120298883A1 | 2012-11-29 |
Other References:
See also references of EP 3545287A4
Attorney, Agent or Firm:
CHINA PAT INTELLECTUAL PROPERTY OFFICE (CN)
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