Title:
VACUUM DRYING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/042959
Kind Code:
A2
Abstract:
Disclosed is a vacuum drying apparatus. The vacuum drying apparatus according to the present invention dries an object using a pressure difference and heat, thus enabling the solvent mixed with a coating liquid coated on the object to be excellently dried. When a large amount of solvent is dried, a coating liquid may be hardened to the core thereof, and therefore, problems of the coating liquid leaning to one side or of generating pores caused by the solvent remaining at the coating liquid may be reduced. Consequently, reliability of the dried object can be improved. In addition, a connector is arranged in a housing to transmit power from an external source to a heater installed within the housing, and the space between the connector and the housing is completely sealed to achieve further excellent efficiency in drying the solvent mixed with the coating liquid coated on the object.
More Like This:
Inventors:
JEON YOUNG JUN (KR)
LEE MIN CHUL (KR)
LEE MIN CHUL (KR)
Application Number:
PCT/KR2012/007545
Publication Date:
March 28, 2013
Filing Date:
September 20, 2012
Export Citation:
Assignee:
TERA SEMICON CORP (KR)
International Classes:
H01L21/302; F26B5/04
Foreign References:
| KR20070055829A | 2007-05-31 | |||
| JPH10311676A | 1998-11-24 | |||
| KR100859975B1 | 2008-09-25 | |||
| KR100787873B1 | 2007-12-27 |
Attorney, Agent or Firm:
SU INTELLECTUAL PROPERTY (KR)
특허법인 수 (KR)
특허법인 수 (KR)
Download PDF:
Claims:
Previous Patent: PRODUCTION METHOD FOR A SUPPORT TYPE COATING MEMBRANE USING TAPE CASTING
Next Patent: METHOD FOR PREPARING MICROVESICULAR ADAM15
Next Patent: METHOD FOR PREPARING MICROVESICULAR ADAM15