Title:
VACUUM PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/166653
Kind Code:
A1
Abstract:
A vacuum processing device according to the present invention comprises: a chamber having an upper wall in which a first opening and a second opening are formed; an upper lid which opens/closes the first opening; a hinge mechanism which is provided to cover the second opening and pivotally supports the upper lid with respect to the first opening; a first sealing member which is provided between the upper lid and the upper wall so as to surround the first opening and elastically deforms; and a second sealing member which is provided between the hinge mechanism and the upper wall so as to surround the second opening and elastically deforms.
Inventors:
YOKOYAMA SHUICHI (JP)
TAKEYAMA TERUSHIGE (JP)
KISHI IORI (JP)
KOUNO TOSHIMITSU (JP)
KICHIKAWA TOMOHIRO (JP)
IKENAGA HIDETAKA (JP)
TSUKAMOTO NORIHITO (JP)
OOISHI TETSUYA (JP)
TAMURA NAOKI (JP)
YASUMATSU YASUSHI (JP)
TAKEYAMA TERUSHIGE (JP)
KISHI IORI (JP)
KOUNO TOSHIMITSU (JP)
KICHIKAWA TOMOHIRO (JP)
IKENAGA HIDETAKA (JP)
TSUKAMOTO NORIHITO (JP)
OOISHI TETSUYA (JP)
TAMURA NAOKI (JP)
YASUMATSU YASUSHI (JP)
Application Number:
PCT/JP2022/009105
Publication Date:
September 07, 2023
Filing Date:
March 03, 2022
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
International Classes:
F16J13/04; B01J3/03; C23C16/44
Foreign References:
| JP2021077815A | 2021-05-20 | |||
| JP2012087923A | 2012-05-10 | |||
| JPS57196854U | 1982-12-14 | |||
| JP2011179531A | 2011-09-15 | |||
| JP2005012174A | 2005-01-13 |
Attorney, Agent or Firm:
OKABE, Yuzuru et al. (JP)
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