Title:
VACUUM PUMP, STATOR COLUMN, BASE, AND VACUUM PUMP EXHAUST SYSTEM
Document Type and Number:
WIPO Patent Application WO/2020/004055
Kind Code:
A1
Abstract:
[Problem] To provide: a vacuum pump for accurately measuring the temperature of a rotary part at a low cost; a stator column of the vacuum pump; a base; and a vacuum pump exhaust system. [Solution] In a vacuum pump according to the present embodiment, a screw groove-type seal is provided in a flow path of purge gas on the downstream side of a temperature sensor unit and causes a portion of the purge gas to flow backward towards the temperature sensor unit so that the pressure of the purge gas near the temperature sensor unit increases. By so doing, with a small amount of purge gas, the gas pressure around the temperature sensor unit can be made to be an intermediate flow or a viscous flow, and the total amount of supplied purge gas can be suppressed, thereby contributing to a reduction in cost as a result.
Inventors:
KABASAWA TAKASHI (JP)
Application Number:
PCT/JP2019/023435
Publication Date:
January 02, 2020
Filing Date:
June 13, 2019
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2010021307A1 | 2010-02-25 |
Foreign References:
| JP2013101145A | 2013-05-23 | |||
| JPH1162880A | 1999-03-05 | |||
| JP2014190343A | 2014-10-06 | |||
| JPH10299689A | 1998-11-10 | |||
| JP2010038137A | 2010-02-18 | |||
| JPH1137087A | 1999-02-09 | |||
| JP3201348B2 | 2001-08-20 |
Other References:
See also references of EP 3816453A4
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