Title:
VACUUM PUMP, TEMPERATURE ADJUSTMENT CONTROL DEVICE APPLIED TO VACUUM PUMP, INSPECTION TOOL, AND DIAGNOSIS METHOD FOR TEMPERATURE ADJUSTMENT FUNCTION UNIT
Document Type and Number:
WIPO Patent Application WO/2019/013118
Kind Code:
A1
Abstract:
[Problem] To provide: a vacuum pump that is capable of self-diagnosing a temperature adjustment function by a simple device and carrying out generic inspection without needing a large inspection device; a temperature adjustment control device applied to the vacuum pump; an inspection tool; and a diagnosis method for a temperature adjustment function unit. [Solution] In step 5, an inspection program determines whether or not a simulated temperature is 80 degrees by detecting, by use of a voltage value acquired through voltage-conversion, a fixed resistance R1 corresponding to a TMS temperature sensor 155. Upon detection that the simulated temperature is 80 degrees, the process advances to step 6, and a simulated output corresponding to turning-ON of a TMS heater 151 between a terminal 311 and a terminal 309 of a TMS control device 300 is performed. In step 7, the inspection program determines whether or not the simulated temperature is 150 degrees by detecting, by use of a voltage value acquired through voltage-conversion, a fixed resistance R2 corresponding to the TMS temperature sensor 155. Upon detection that the simulated temperature is 150 degrees, the process advances to step 8, and the output current flowing between the terminal 311 and the terminal 309 of the TMS control device 300 is cut.
Inventors:
FUKAMI HIDEO (JP)
ISHIBASHI MASATOSHI (JP)
ISHIBASHI MASATOSHI (JP)
Application Number:
PCT/JP2018/025668
Publication Date:
January 17, 2019
Filing Date:
July 06, 2018
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2011021428A1 | 2011-02-24 |
Foreign References:
| JP2016160917A | 2016-09-05 | |||
| JP2011226377A | 2011-11-10 | |||
| JP2008184904A | 2008-08-14 | |||
| JP2009041458A | 2009-02-26 | |||
| JPS6213796A | 1987-01-22 | |||
| JP2000064964A | 2000-03-03 | |||
| JP2004301322A | 2004-10-28 | |||
| JP2017089462A | 2017-05-25 | |||
| JPS6361782A | 1988-03-17 | |||
| JP2003278692A | 2003-10-02 |
Other References:
See also references of EP 3653883A4
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