Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2010/021307
Kind Code:
A1
Abstract:
Provided is a vacuum pump in which the temperature of a rotor is more accurately detected by a simpler method.
A sensor unit in which a thermistor (51) is fixed to a frame (53) by a thin film such as a polyimide film is disposed on a stator while facing a rotor section that is an object of temperature detection. On condition that the outflow of heat from a first temperature sensor to the frame, the stator, and the like which is not negligible in measurement exists, the influence thereof is detected by another sensor, thereby compensating for the temperature decrease and temperature increase of the first temperature sensor and estimating the more accurate rotor temperature.
More specifically, by disposing a second temperature sensor or the second and a third temperature sensor with respect to the first temperature sensor, the temperature of the rotor section is estimated from a first detected value by the first temperature sensor and a second detected value (and a third detected value) by the second temperature sensor (and the third temperature sensor).
Inventors:
NONAKA MANABU (JP)
SAKAGUCHI YOSHIYUKI (JP)
SAKAGUCHI YOSHIYUKI (JP)
Application Number:
PCT/JP2009/064393
Publication Date:
February 25, 2010
Filing Date:
August 17, 2009
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
NONAKA MANABU (JP)
SAKAGUCHI YOSHIYUKI (JP)
NONAKA MANABU (JP)
SAKAGUCHI YOSHIYUKI (JP)
International Classes:
F04D19/04; G01K3/14
Foreign References:
| JPH10266991A | 1998-10-06 | |||
| JPH11132186A | 1999-05-18 | |||
| JP2004116319A | 2004-04-15 | |||
| JPS6419198U | 1989-01-31 | |||
| JPH1137087A | 1999-02-09 | |||
| JPH1137087A | 1999-02-09 |
Other References:
See also references of EP 2317148A4
Attorney, Agent or Firm:
NAKANO, Hitoshi et al. (JP)
Hitoshi Nakano (JP)
Hitoshi Nakano (JP)
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