Title:
VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD, AND METHOD FOR PRODUCING ORGANIC EL DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/038812
Kind Code:
A1
Abstract:
Provided are: a vapor deposition apparatus capable of preventing heat generation from a magnetic chuck through the use of a magnetic chuck that makes it less likely for a vapor deposition mask and a substrate to be subjected to vapor deposition to be affected by magnetic fields during alignment thereof and exerts a strong pull on the vapor deposition mask to bring the substrate undergoing vapor deposition into close contact with the vapor deposition mask during vapor deposition; a vapor deposition method; and a method for producing an organic EL display device. In said vapor deposition apparatus, the magnetic chuck (3) is provided with a permanent magnet (3A) and an electromagnet (3B).
Inventors:
KISHIMOTO KATSUHIKO (JP)
SAKIO SUSUMU (JP)
SAKIO SUSUMU (JP)
Application Number:
PCT/JP2017/029815
Publication Date:
February 28, 2019
Filing Date:
August 21, 2017
Export Citation:
Assignee:
SAKAI DISPLAY PRODUCTS CORP (JP)
International Classes:
C23C14/50; H01L27/32; H01L51/50; H05B33/10
Domestic Patent References:
| WO2009118888A1 | 2009-10-01 |
Foreign References:
| JPH10152776A | 1998-06-09 | |||
| JP2007131935A | 2007-05-31 | |||
| JP2010086809A | 2010-04-15 | |||
| JP2003187973A | 2003-07-04 |
Attorney, Agent or Firm:
ASAHINA & CO. (JP)
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