Title:
VAPOR DEPOSITION DEVICE, METHOD FOR PRODUCING DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/228400
Kind Code:
A1
Abstract:
The vapor deposition device (1) comprises a crucible (11) that houses a vapor deposition material (M) and a heat source (12) that heats the vapor deposition material (M). The vapor deposition device is provided on a short side wall (11c), which is a specific portion within the crucible (11) where heat from the heat source (12) is less likely to be conveyed than other portions within the crucible (11), with an inclined portion (20) that rolls particles of the vapor deposition material M downward and in a direction separate from the specific portion.
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| WO/2020/107589 | VAPOR DEPOSITION DEVICE |
| WO/2021/139880 | EVAPORATION METHOD, EVAPORATION APPARATUS, AND EVAPORATION SOURCE |
Inventors:
KOBAYASHI YUHKI
INOUE TSUYOSHI
INOUE TSUYOSHI
Application Number:
PCT/JP2022/021711
Publication Date:
November 30, 2023
Filing Date:
May 27, 2022
Export Citation:
Assignee:
SHARP DISPLAY TECHNOLOGY CORP (JP)
International Classes:
C23C14/24
Foreign References:
| JP2014201834A | 2014-10-27 | |||
| JPH04103760A | 1992-04-06 | |||
| JP2020190013A | 2020-11-26 | |||
| JPH0797681A | 1995-04-11 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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