Title:
VAPORIZATION DEVICE AND VAPORIZATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2018/190074
Kind Code:
A1
Abstract:
The purpose of the invention is to enable accurate detection of the liquid level of a liquid material inside a container. This vaporization device comprises: a container 10 that contains a liquid material X; a heater 30 that heats the liquid material X inside the container 10; and a liquid level sensor 20 that detects the liquid level of the liquid material inside the container 10. Viewing the interior of the container 10 from above, the container is constituted such that a vaporization region S1 in which the liquid material X is vaporized and a liquid level stable region S2 that is different from the vaporization region S1 are formed. The liquid level sensor 20 detects the liquid level of the liquid material X in the liquid level stable region S2.
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Inventors:
TAGUCHI AKIHIRO (JP)
KYOYAMA RYOICHI (JP)
KYOYAMA RYOICHI (JP)
Application Number:
PCT/JP2018/010421
Publication Date:
October 18, 2018
Filing Date:
March 16, 2018
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
International Classes:
B01J7/00
Foreign References:
| JP2000046631A | 2000-02-18 | |||
| JPS6483663A | 1989-03-29 | |||
| JP2014007289A | 2014-01-16 | |||
| JPH115157A | 1999-01-12 | |||
| JP2006045637A | 2006-02-16 | |||
| JPS6483666A | 1989-03-29 | |||
| JPH08227848A | 1996-09-03 | |||
| JP2009022905A | 2009-02-05 | |||
| JPS61135245U | 1986-08-23 | |||
| JPS63201691U | 1988-12-26 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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