Title:
VAPORIZER, LIQUID MATERIAL VAPORIZATION DEVICE, AND VAPORIZATION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/039886
Kind Code:
A1
Abstract:
A vaporizer for vaporizing a liquid material or a gas-liquid mixture obtained by mixing the liquid material and a carrier gas, the vaporizer being such that the occurrence of local cold spots is suppressed without raising the risk of blocking a nozzle, wherein the vaporizer comprises a nozzle L4 through which the liquid material or gas-liquid mixture is guided, a heating flow path L5 through which the liquid material or gas-liquid mixture sprayed form the nozzle L4 is guided, and a hot gas supply path L6 for supplying a hot gas to the heating flow path L5.
Inventors:
NISHIKAWA ICHIRO (JP)
MIYAMOTO HIDEAKI (JP)
MIYAMOTO HIDEAKI (JP)
Application Number:
PCT/JP2019/030370
Publication Date:
February 27, 2020
Filing Date:
August 01, 2019
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
International Classes:
B01J7/02; C23C16/448; H01L21/205; H01L21/31
Foreign References:
| JP2011082196A | 2011-04-21 | |||
| JP2010219421A | 2010-09-30 | |||
| JP2010028000A | 2010-02-04 | |||
| JP2012177193A | 2012-09-13 | |||
| JPH0925578A | 1997-01-28 | |||
| JP2000315686A | 2000-11-14 | |||
| JP2006322047A | 2006-11-30 | |||
| KR20130061803A | 2013-06-12 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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