Title:
VAPORIZER
Document Type and Number:
WIPO Patent Application WO/2020/021796
Kind Code:
A1
Abstract:
Provided is a vaporizer which causes very little pressure fluctuation in a vaporization space by suppression of bumping when a method not using an atomizer is used. The vaporizer 1 comprises: a container body 10; a heated porous member 30 disposed inside the vaporizer 1; an introduction pipe 40 for supplying a liquid raw material L to the porous member 30; and a gas discharge path 7 for discharging a vaporized raw material gas G to the outside. An outlet 41 of the introduction pipe 40 is disposed in contact with or in close proximity to the porous member 30. When the outlet 41 is disposed in close proximity to the porous member 30, the clearance H from the outlet 41 to the porous member 30 is in a range not exceeding the distance from the outlet 41 to the bottom of a drop of the liquid raw material L hanging from the outlet 41 due to surface tension.
Inventors:
ONO HIROFUMI (JP)
YAGI SHIGEO (JP)
YAMAMOTO KENTA (JP)
YAGI SHIGEO (JP)
YAMAMOTO KENTA (JP)
Application Number:
PCT/JP2019/016959
Publication Date:
January 30, 2020
Filing Date:
April 22, 2019
Export Citation:
Assignee:
LINTEC CO LTD (JP)
International Classes:
C23C16/448; B01J7/02; H01L21/31
Domestic Patent References:
| WO2013094680A1 | 2013-06-27 |
Foreign References:
| JPH1085581A | 1998-04-07 | |||
| JP2001239151A | 2001-09-04 | |||
| JP2008538158A | 2008-10-09 |
Attorney, Agent or Firm:
MORI Yoshiaki et al. (JP)
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