Title:
VAPORIZER
Document Type and Number:
WIPO Patent Application WO/2020/195349
Kind Code:
A1
Abstract:
A vaporizer (1a) equipped with a tank (2) in which a liquid material is heated to generate a gas, a gas feed valve (3a) for start or halt the feeding of the generated gas, and a flow rate control means (4) for controlling the flow rate of a gas flowing out through the gas feed valve (3a), wherein the gas feed valve (3a) and the flow rate control means (4) are fixed to a fixing member (5), a fixing member heater (5a) is provided on a surface of the fixing member (5) which is not fixed to the gas feed valve (3a) or the flow rate control means (4), the gas feed valve (3a) and the flow rate control means (4) come in contact with one or more heat transfer plates (6), and a heat transfer plate heater (6a) is provided on a surface of at least one of the heat transfer plates (6) which is not in contact with the gas feed valve (3a) or the flow rate control means (4).
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Inventors:
YOSHIDA YOSHINORI (JP)
SASAKI AKIRA (JP)
HATTORI AKIHIRO (JP)
GOTO TAKAO (JP)
SASAKI AKIRA (JP)
HATTORI AKIHIRO (JP)
GOTO TAKAO (JP)
Application Number:
PCT/JP2020/006267
Publication Date:
October 01, 2020
Filing Date:
February 18, 2020
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
International Classes:
C23C16/448; B01J7/02; H01L21/205; H01L21/31
Foreign References:
| JP2009149939A | 2009-07-09 | |||
| JPH0774113A | 1995-03-17 | |||
| JP2014007289A | 2014-01-16 | |||
| JP2011518256A | 2011-06-23 |
Attorney, Agent or Firm:
PROSPEC PATENT FIRM (JP)
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