Title:
VARIABLE-AREA COMB CAPACITOR-BASED MEMS RELATIVE GRAVIMETER PROBE AND GRAVIMETER
Document Type and Number:
WIPO Patent Application WO/2023/231200
Kind Code:
A1
Abstract:
A variable-area comb capacitor-based MEMS relative gravimeter probe, comprising spring structures (1), a proof mass (2), movable comb teeth (3), fixed comb teeth (4, 5) and an outer frame (6), of the spring structures (1), fixed ends being arranged on the outer frame (6) and free ends being connected to the proof mass (2), the movable comb teeth (3) being arranged on the upper surface and the lower surface of the proof mass (2), the fixed comb teeth (4, 5) being correspondingly arranged on the outer frame (6), the movable comb teeth (3) and the fixed comb teeth (4, 5) each being a special-shaped comb tooth structure, the special-shaped comb tooth structure comprising a bottom comb tooth (8) and a top comb tooth (7), the width of the bottom comb tooth (8) being less than the width of the top comb tooth (7), the bottom comb teeth (8) of the movable comb teeth (3) being fixed to the proof mass (2), the bottom comb teeth (8) of the fixed comb teeth (4, 5) being fixed to the outer frame (6), in operation, the spring structures (1) being used for converting an acceleration of gravity change to be measured into a displacement change of the proof mass (2), and the top comb teeth (7) of the movable comb teeth (3) and the top comb teeth (7) of the fixed comb teeth (4, 5) constituting a variable-area differential comb capacitor structure. The structure can improve the sensitivity of capacitive displacement sensing, and reduce the mechanical thermal noise of the gravimeter probe.
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Inventors:
WU WENJIE (CN)
CAI BINGYANG (CN)
GAO LE (CN)
WANG YUANLEI (CN)
TU LIANGCHENG (CN)
CAI BINGYANG (CN)
GAO LE (CN)
WANG YUANLEI (CN)
TU LIANGCHENG (CN)
Application Number:
PCT/CN2022/115363
Publication Date:
December 07, 2023
Filing Date:
August 29, 2022
Export Citation:
Assignee:
UNIV HUAZHONG SCIENCE TECH (CN)
International Classes:
G01V7/00; G01P15/125
Foreign References:
| CN114422923A | 2022-04-29 | |||
| CN207832823U | 2018-09-07 | |||
| CN113702665A | 2021-11-26 | |||
| CN109142783A | 2019-01-04 | |||
| CN102798734A | 2012-11-28 | |||
| CN111381073A | 2020-07-07 | |||
| CN111551761A | 2020-08-18 | |||
| CN110806498A | 2020-02-18 | |||
| US20100024552A1 | 2010-02-04 | |||
| JP2000266777A | 2000-09-29 |
Attorney, Agent or Firm:
HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY PATENT AGENCY CENTER (CN)
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