VARIABLE CAPACITANCE DEVICE

WIPO Patent Application WO/2011/158620

A1

Provided is a variable capacitance device which can prevent a failure of a MEMS, caused due to an electrostatic charge, and can easily maintain a constant correlation between a drive capacitance and a radio frequency (RF) capacitance. A variable capacitance device (1) is provided with a support plate (2), a movable beam (3), drive capacitance units (C2A, C2B), RF capacitance units (C1A, C1B), a stopper unit (12), and unipotential electrodes (9A, 9B). The movable beam (3) has a cantilever beam structure parallel to the main surface of the support plate (2). The stopper unit (12) is provided so that the longitudinal direction thereof is along the main axis direction of the movable beam, on the area of a dielectric film (8) opposite to the drive capacitance electrodes (7A, 7B) constituting the drive capacitance units (C2A, C2B), via a gap. The unipotential electrodes (9A, 9B) are opposite to the area on which the stopper unit (12) is provided, via the dielectric film (8), and are connected to the drive capacitance electrodes (7A, 7B) at the same potential.

WO/2021/109110	CAPACITIVE TOUCH SENSOR
JPS62501387	[Title of the Invention] A variable gap device and a manufacturing method
JP2014212159	VARIABLE CAPACITANCE CAPACITOR

UMEDA KEIICHI (JP)
SHIBAHARA TERUHISA (JP)

PCT/JP2011/061925

December 22, 2011

May 25, 2011

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MURATA MANUFACTURING CO (JP)
UMEDA KEIICHI (JP)
SHIBAHARA TERUHISA (JP)

H01G5/16; B81B3/00

JP2006165380A	2006-06-22
JP2009212451A	2009-09-17
JP2008005642A	2008-01-10
JP2003039392A	2003-02-13
JP2008300284A	2008-12-11

Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)

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