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Title:
VARIABLE-CAPACITANCE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/168215
Kind Code:
A1
Abstract:
A variable-capacitance element (1) is provided with: a sealed container (2) containing a gas; a first electrode (3) that is disposed inside of the sealed container (2) and is grounded; a second electrode (4) disposed inside of the sealed container (2) to face the first electrode (3); a first variable power supply (5) one end of which is connected to the second electrode (4) and another end of which is grounded, the first variable power supply (5) being configured to apply a direct-current voltage between the first electrode (3) and the second electrode (4) and capable of changing the direct-current voltage; and a discharge controller (6) that converts the gas contained in the sealed container (2) into a plasma state and is capable of changing the electron density of plasma (7). The impedance between the first electrode (3) and the second electrode (4) can be changed by adjusting the direct-current voltage with the first variable power supply (5) and adjusting the electron density of the plasma (7) with the discharge controller (6).

Inventors:
NISHIOKA SHU (JP)
YAMAURA SHINGO (JP)
NAITO TERUKI (JP)
NISHIMOTO KENGO (JP)
NISHIOKA YASUHIRO (JP)
Application Number:
PCT/JP2021/004012
Publication Date:
August 11, 2022
Filing Date:
February 04, 2021
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
H01G7/00; H05H1/00
Foreign References:
JPH06243990A1994-09-02
JP2013098177A2013-05-20
JPH07169590A1995-07-04
JP2017155292A2017-09-07
JP2002540582A2002-11-26
Attorney, Agent or Firm:
SANNO PATENT ATTORNEYS OFFICE (JP)
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