Title:
VARIABLE RELUCTANCE FAST POSITIONING SYSTEM AND METHODS
Document Type and Number:
WIPO Patent Application WO2005043266
Kind Code:
A3
Abstract:
The preferred embodiments of the present invention are directed to high bandwidth positioning systems such as fast tool servos (FTS). The applications of this invention include, for example, diamond turning of mold with structured surface for mass production of films for brightness enhancement and controlled reflectivity, diamond turning of molds for contact lens and micro-optical positioning devices. Preferred embodiments of the fast tool servo can have a closed-loop bandwidth of approximately 20 ± 5 kHz, with acceleration of up to approximately 1000 G or more. The resolution or position error is approximately 1 nm root mean square (RMS). In a preferred embodiment, the full stroke of 50 µm can be achieved up to l kHz operation.
Inventors:
LU XIAODONG (US)
TRUMPER DAVID L (US)
TRUMPER DAVID L (US)
Application Number:
PCT/US2004/036403
Publication Date:
September 09, 2005
Filing Date:
October 29, 2004
Export Citation:
Assignee:
MASSACHUSETTS INST TECHNOLOGY (US)
LU XIAODONG (US)
TRUMPER DAVID L (US)
LU XIAODONG (US)
TRUMPER DAVID L (US)
International Classes:
B23B1/00; B23B3/00; B23B5/36; H02K33/00; H02K33/16; (IPC1-7): H02K33/00
Foreign References:
| US5808384A | 1998-09-15 | |||
| US5909069A | 1999-06-01 |
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