Title:
VARIABLE RESISTANCE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2010/073897
Kind Code:
A1
Abstract:
A variable resistance element which comprises a lower electrode (101), an upper electrode (103) and a variable resistance layer (102) that is positioned between the lower electrode (101) and the upper electrode (103). The variable resistance layer (102) comprises a nickel oxide layer (121) and an amorphous tantalum oxide layer (122) and the nickel oxide layer (121) is formed in such a manner as being in contact with the lower electrode (101). Preferably, the tantalum oxide layer (122) has a stoichiometric composition. Basically, the lower electrode (101) and the upper electrode (103) only need to be conductive.
Inventors:
SAKOTSUBO YUKIHIRO (JP)
TERAI MASAYUKI (JP)
TERAI MASAYUKI (JP)
Application Number:
PCT/JP2009/070469
Publication Date:
July 01, 2010
Filing Date:
December 07, 2009
Export Citation:
Assignee:
NEC CORP (JP)
SAKOTSUBO YUKIHIRO (JP)
TERAI MASAYUKI (JP)
SAKOTSUBO YUKIHIRO (JP)
TERAI MASAYUKI (JP)
International Classes:
H01L27/10; H01L45/00; H01L49/00
Domestic Patent References:
| WO2007013174A1 | 2007-02-01 | |||
| WO2008075471A1 | 2008-06-26 | |||
| WO2008126366A1 | 2008-10-23 | |||
| WO2009154266A1 | 2009-12-23 |
Foreign References:
| JP2008078509A | 2008-04-03 | |||
| JP2009135370A | 2009-06-18 | |||
| JP2009212380A | 2009-09-17 |
Attorney, Agent or Firm:
YAMAKAWA, Masaki et al. (JP)
Masaki Yamakawa (JP)
Masaki Yamakawa (JP)
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