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Title:
VERTICAL CONTACT-TYPE PROBE, PROBE CARD, AND SOCKET
Document Type and Number:
WIPO Patent Application WO/2021/235483
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a vertical contact-type probe, a probe card, and a socket that have excellent durability for the inspection of a DUT, i.e., a semiconductor IC or a packaged semiconductor, having a small electrode interval, and that can handle high-frequency inspection of DUTs having high operation frequency. Provided is a vertical contact-type probe (1) which, in a state in which: a first needle-like electrically conductive member (20) extends in a thickness direction of an elastomer sheet (12) on a first surface (10a) side of an elastomer connector (10); a first end (20a) of the first needle-like electrically conductive member (20) is in contact with a metal thin wire (14); a second needle-like electrically conductive member (30) extends in a thickness direction of the elastomer sheet (12) on a second surface (10b) side of the elastomer connector (10); a first end (30a) of the second needle-like electrically conductive member (30) is in contact with the metal thin wire (14); and a second end (30b) of the second needle-like electrically conductive member (30) is in contact with an electrode terminal of a circuit board, inspects a DUT by causing a second end (20b) of the first needle-like electrically conductive member (20) to contact an electrode of the DUT.

Inventors:
TSUCHIYA MASATOSHI (JP)
TAKADA TORU (JP)
Application Number:
PCT/JP2021/018968
Publication Date:
November 25, 2021
Filing Date:
May 19, 2021
Export Citation:
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Assignee:
SHINETSU POLYMER CO (JP)
TAKADA RF LABS INC (JP)
International Classes:
H01L23/32; G01R1/073; G01R31/26; H01L21/66; H01R33/76
Domestic Patent References:
WO2009147929A12009-12-10
WO2009075220A12009-06-18
Foreign References:
JPH08327689A1996-12-13
JP2011204401A2011-10-13
JP2009193710A2009-08-27
JPH09330777A1997-12-22
US20050270057A12005-12-08
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
Download PDF:
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