Title:
VERTICAL VACUUM ELECTRONIC DEVICE, MANUFACTURING METHOD THEREFOR, AND INTEGRATED DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/034260
Kind Code:
A1
Abstract:
Disclosed are a vertical vacuum electronic device, an integrated device, and a method of manufacturing a vertical vacuum electronic device. In particular, a vertical vacuum electronic device according to an embodiment of the present invention comprises: a substrate; a first electrode layer formed on a surface of the substrate such that a predetermined region of the surface of the substrate is exposed; an insulation material formed on the first electrode layer in a shape so as to surround the predetermined region; a second electrode layer formed on the insulation material; and a gate that is inserted into the insulation material and arranged in a shape so as to surround the predetermined region and has some exposed faces surrounding the predetermined region, wherein the predetermined region is determined according to the pattern of the gate.
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Inventors:
LEE CHEOL JIN (KR)
SHIN CHANG HWAN (KR)
SHIN DONG HOON (KR)
YUN KI NAM (KR)
SHIN CHANG HWAN (KR)
SHIN DONG HOON (KR)
YUN KI NAM (KR)
Application Number:
PCT/KR2014/008267
Publication Date:
March 12, 2015
Filing Date:
September 03, 2014
Export Citation:
Assignee:
UNIV KOREA RES & BUS FOUND (KR)
International Classes:
H01J31/02
Foreign References:
| JP2008311083A | 2008-12-25 | |||
| KR19980081291A | 1998-11-25 | |||
| JP2735118B2 | 1998-04-02 | |||
| KR20010112863A | 2001-12-22 |
Attorney, Agent or Firm:
MAPS Intellectual Property Law Firm (KR)
특허법인 엠에이피에스 (KR)
특허법인 엠에이피에스 (KR)
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