Title:
VIBRATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2022/000792
Kind Code:
A1
Abstract:
Provided in the present application is a vibration sensor, comprising a circuit board, an outer shell fixed on the circuit board and with the circuit board enclosing an accommodating cavity, a diaphragm assembly accommodated in the accommodating cavity and dividing the accommodating cavity into a first cavity and a second cavity, a MEMS microphone, and an ASIC chip attached to the side of the second cavity closest to the diaphragm assembly and being electrically connected to the MEMS microphone, the outer shell being provided with a first pressure relief hole, the MEMS microphone being accommodated in the second cavity and being electrically connected to the circuit board, the MEMS microphone comprising a base fixed to the circuit board and provided with a rear cavity, a first diaphragm supported on the end of the base furthest from the circuit board, and a rear electrode plate, the first diaphragm and the rear electrode plate being spaced apart to form a capacitor structure; when the vibration sensor inputs a vibration signal or pressure signal, the diaphragm assembly vibrates and changes the air pressure in the accommodating cavity. The vibration sensor of the present application has higher sensitivity and better reliability.
Inventors:
ZENG PENG (CN)
WANG TIANJIAO (CN)
WANG TIANJIAO (CN)
Application Number:
PCT/CN2020/114982
Publication Date:
January 06, 2022
Filing Date:
September 14, 2020
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H04R19/00
Domestic Patent References:
| WO2018137275A1 | 2018-08-02 |
Foreign References:
| CN206136292U | 2017-04-26 | |||
| CN110907029A | 2020-03-24 | |||
| CN111031460A | 2020-04-17 | |||
| CN104902415A | 2015-09-09 | |||
| US20070007858A1 | 2007-01-11 |
Attorney, Agent or Firm:
SHENZHEN JUNXINCHENG INTELLECTUAL PROPERTY FIRM (GENERAL PARTNERSHIP) (CN)
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