Title:
WAFER HOLDER AND OPERATING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/168663
Kind Code:
A1
Abstract:
A wafer holder includes a carrier plate, and blocking devices. The carrier plate includes a base and a guiding structure. The base has a carrier surface. The guiding structure surrounds the base. The blocking devices are coupled to the carrier plate through the guiding structure, and the blocking devices are configured to move along the guiding structure. Each of the blocking devices has a curved wall, and the curved walls at least partially surrounds an area above the carrier surface.
Inventors:
ZHU XUDONG (CN)
Application Number:
PCT/CN2022/080207
Publication Date:
September 14, 2023
Filing Date:
March 10, 2022
Export Citation:
Assignee:
INNOSCIENCE SUZHOU SEMICONDUCTOR CO LTD (CN)
International Classes:
H01L21/687; H01L21/683
Foreign References:
| US20200219743A1 | 2020-07-09 | |||
| US6550619B2 | 2003-04-22 | |||
| CN111211084A | 2020-05-29 | |||
| CN202977389U | 2013-06-05 |
Attorney, Agent or Firm:
BEIJING BESTIPR INTELLECTUAL PROPERTY LAW CORPORATION (CN)
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