Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
WAFER INSPECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2024/048800
Kind Code:
A1
Abstract:
The present invention comprises: a wafer transfer unit which loads and unloads a wafer to be inspected; a wafer inspection unit which receives a wafer transferred from the wafer transfer unit and acquires three-dimensional information on the wafer by using a hologram image; and a control unit which identifies, from the three-dimensional information measured by the wafer inspection unit, whether the wafer is normal or abnormal, and controls the wafer transfer unit and the wafer inspection unit.

More Like This:
JPH07119707[Title of Invention] Inspection method for optical disc
JP4633254Measurement of diffractive structure, broadband, polarization, ellipsometry and underlying structure
JP2001343333INSPECTION DEVICE
Inventors:
BACK SEUNG GYUN (KR)
LEE JAE YEOL (KR)
SHIN HO CHEOL (KR)
Application Number:
PCT/KR2022/012847
Publication Date:
March 07, 2024
Filing Date:
August 29, 2022
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
GOOIL ENG CO LTD (KR)
International Classes:
G01N21/95; G01B11/24; G01N21/88; G03H1/00; G03H1/04; H01L21/677; H01L21/68
Domestic Patent References:
WO2016182820A12016-11-17
Foreign References:
KR20210005976A2021-01-15
KR20200074928A2020-06-25
KR20090033977A2009-04-07
KR20040009242A2004-01-31
KR20230046037A2023-04-05
KR20230049446A2023-04-13
Attorney, Agent or Firm:
HAEDAM IP GROUP (KR)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: METHOD FOR PRODUCING EFFLORESCENCE-REMOVING CHEMICAL SOLUTION, EFFLORESCENCE-REMOVING CHEMICAL SOLUT...

Next Patent: ROULETTE GAME DEVICE