Title:
WAFER STORAGE CONTAINER
Document Type and Number:
WIPO Patent Application WO/2016/153291
Kind Code:
A1
Abstract:
The present invention relates to a wafer storage container, more particularly, relates to a wafer storage container wherein the space of the wafer storage container is divided into the spaces, namely a storage room, a gas injection room, and a gas exhausting room, which are independent and separate from each other, so when the wafer storage container is transported to the load port and being coupled therewith, the purge gas is injected/exhausted through the separating walls inside the storage room, thereby efficiently removing the remaining fumes on the surface of the wafer.
Inventors:
WOO BUM JE (KR)
YOON SEOK MUN (KR)
HAN MYOUNG SOK (KR)
KIM HYUN SIN (KR)
YOON SEOK MUN (KR)
HAN MYOUNG SOK (KR)
KIM HYUN SIN (KR)
Application Number:
PCT/KR2016/003000
Publication Date:
September 29, 2016
Filing Date:
March 24, 2016
Export Citation:
Assignee:
PICO & TERA CO LTD (KR)
WOO BUM JE (KR)
WOO BUM JE (KR)
International Classes:
H01L21/673; H01L21/02; H01L21/54
Foreign References:
| KR101366135B1 | 2014-02-25 | |||
| JP2012004199A | 2012-01-05 | |||
| KR20100073568A | 2010-07-01 | |||
| KR20060100992A | 2006-09-22 | |||
| KR20110041445A | 2011-04-21 |
Attorney, Agent or Firm:
DARAE IP FIRM (KR)
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