Title:
WAFER STORING CONTAINER
Document Type and Number:
WIPO Patent Application WO/2010/061431
Kind Code:
A1
Abstract:
When an opening section (1a) of a storing container main body (1) is covered with a cover body (2), a plurality of semiconductor wafers (W) are elastically held by a receiving side retainer (4) and a pressing side retainer (5) and separated from wafer placing grooves (31), in a state where the wafers are arranged upright parallel to each other in the storing container main body (1). When the opening section (1a) is not covered with the cover body (2), each semiconductor wafer (W) returns to the state where it is placed in each wafer placing groove (31). Thus, at the time of carrying in and out the semiconductor wafers (W) by having the semiconductor wafers (W) arranged and stored upright, the semiconductor wafers (W) are accurately aligned, and the semiconductor wafers (W) are surely protected from shocks and vibration for transportation and storage.
Inventors:
MATSUTORI CHIAKI (JP)
IIMURA YASUHARU (JP)
NAGASHIMA TSUYOSHI (JP)
IIMURA YASUHARU (JP)
NAGASHIMA TSUYOSHI (JP)
Application Number:
PCT/JP2008/071321
Publication Date:
June 03, 2010
Filing Date:
November 25, 2008
Export Citation:
Assignee:
MIRAIAL CO LTD (JP)
MATSUTORI CHIAKI (JP)
IIMURA YASUHARU (JP)
NAGASHIMA TSUYOSHI (JP)
MATSUTORI CHIAKI (JP)
IIMURA YASUHARU (JP)
NAGASHIMA TSUYOSHI (JP)
International Classes:
H01L21/673
Foreign References:
| JP2007529880A | 2007-10-25 | |||
| JP2005518318A | 2005-06-23 | |||
| JPH07302833A | 1995-11-14 |
Attorney, Agent or Firm:
MITSUI, KAZUHIKO (JP)
Kazuhiko Mitsui (JP)
Kazuhiko Mitsui (JP)
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