Title:
WAVELENGTH-SELECTIVE THERMAL RADIATION MATERIAL FOR SELECTIVELY EMITTING THERMAL RADIATION CORRESPONDING TO IR TRANSMISSION WAVELENGTH REGION OF RESIN MEMBER, AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2015/190163
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a production method for a wavelength-selective thermal radiation material, wherein the surface roughness of the upper portion of the cavity walls separating the microcavities has been limited, or wherein microcavities that have aspect ratios greater than 3.0 have been formed. For a wavelength-selective thermal radiation material for selectively emitting thermal radiation corresponding to the IR transmission wavelength region of the resin member, anisotropic etching is performed on a base material that had been prepared in advance so that one side of the base material has been brought into close contact with a mask having predetermined openings or so that one side of the base material has depressions formed thereon by being pressed by a die having protrusions arrayed corresponding to the positions of microcavities. This allows for the provision of a wavelength-selective thermal radiation material wherein the surface roughness of the upper portion of the cavity walls separating the microcavities has been limited or wherein microcavities having an aspect ratio greater than 3.0 have been formed.
Inventors:
MASUDA HIDEKI (JP)
KONDO TOSHIAKI (JP)
TOYONAGA TAKASHI (JP)
KIMURA NAOSHI (JP)
YOSHIOKA FUMITAKA (JP)
KONDO TOSHIAKI (JP)
TOYONAGA TAKASHI (JP)
KIMURA NAOSHI (JP)
YOSHIOKA FUMITAKA (JP)
Application Number:
PCT/JP2015/060447
Publication Date:
December 17, 2015
Filing Date:
April 02, 2015
Export Citation:
Assignee:
UNIV TOKYO METROPOLITAN (JP)
OKITSUMO INC (JP)
OKITSUMO INC (JP)
International Classes:
H01L23/373; C23F1/20; C25F3/04; C25F3/14; C25F3/20; H01L23/36; H05K7/20
Foreign References:
| JP2010027831A | 2010-02-04 | |||
| JP2014033062A | 2014-02-20 | |||
| JP2004238230A | 2004-08-26 | |||
| JP2013057101A | 2013-03-28 | |||
| JPH1174162A | 1999-03-16 | |||
| JPH04305911A | 1992-10-28 |
Attorney, Agent or Firm:
AKAOKA, Kazuo et al. (JP)
Kazuo Akaoka (JP)
Kazuo Akaoka (JP)
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