Title:
WEATHERIZED DIRECT-MOUNT ABSOLUTE PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2011/084358
Kind Code:
A3
Abstract:
A piezoresistive sensor assembly is provided that has a flex circuit having at least one air flow aperture formed therein. A sensor die is coupled to an absolute support and the flex circuit. The sensor die has a diaphragm that deflects in response to air flow that flows through the air flow aperture and is incident on the diaphragm. The sensor die includes one or more gages positioned on or in the diaphragm.
Inventors:
KWA TOM (US)
DANIELSON DON L (US)
DANIELSON DON L (US)
Application Number:
PCT/US2010/059896
Publication Date:
November 03, 2011
Filing Date:
December 10, 2010
Export Citation:
Assignee:
ENDEVCO CORP (US)
KWA TOM (US)
DANIELSON DON L (US)
KWA TOM (US)
DANIELSON DON L (US)
International Classes:
G01L9/06; B64C3/00; B64C99/00; G01L7/02; G01L7/08
Foreign References:
| US6401542B1 | 2002-06-11 | |||
| US6006607A | 1999-12-28 | |||
| US5509312A | 1996-04-23 |
Other References:
See also references of EP 2513623A4
Attorney, Agent or Firm:
DAVIS, Paul et al. (135 Commonwealth DriveMenlo Park, CA, US)
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