WINDING-TYPE FILM DEPOSITION DEVICE AND WINDING-TYPE FILM DEPOSITION METHOD

Title:

WINDING-TYPE FILM DEPOSITION DEVICE AND WINDING-TYPE FILM DEPOSITION METHOD

Document Type and Number:

WIPO Patent Application WO/2019/230421

Kind Code:

A1

Abstract:

A winding-type film deposition device provided with: a vacuum container; a film running mechanism; a lithium source; and a first roller. The vacuum container is capable of maintaining a decompressed state. The film running mechanism is capable of causing a film to run in the vacuum container. The lithium source is capable of causing lithium to evaporate in the vacuum container. The first roller is disposed between a film deposition surface of the film and the lithium source. The first roller has a transfer pattern for receiving the lithium evaporated from the lithium source. The first roller rotates and transfers a lithium layer pattern corresponding to the transfer pattern onto the film deposition surface.

Inventors:

SAKAMOTO JUNICHI (JP)
SAITO KAZUYA (JP)
KIYOTA JUNYA (JP)
TAKEI MASAKI (JP)
YOKOYAMA AKIHIRO (JP)

Application Number:

PCT/JP2019/019504

Publication Date:

December 05, 2019

Filing Date:

May 16, 2019

Export Citation:

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Assignee:

ULVAC INC (JP)

International Classes:

C23C14/04; B41F5/04; B41F9/00; B41F17/10; B41M1/02; B41M1/10; B41M1/28; B41M1/30; B65H20/00; C23C14/02; C23C14/14; C23C14/24; C23C14/56

Domestic Patent References:

WO2008018297A1	2008-02-14
WO2008018297A1	2008-02-14

Foreign References:

JP2011089160A	2011-05-06
JP2014171999A	2014-09-22
JP2000508579A	2000-07-11
JP2006225710A	2006-08-31
CN101880856A	2010-11-10
JP2014107148A	2014-06-09

Other References: