Title:
WINDOW ARRANGEMENT
Document Type and Number:
WIPO Patent Application WO2005011450
Kind Code:
A3
Abstract:
As part of a chamber configuration, a window arrangement includes a chamber having an interior. The chamber forms a window aperture having an aperture edge. A window, having a pair of opposing major surfaces and a peripheral sidewall configuration extending between the opposing major surfaces, is received in the window aperture with the peripheral sidewall configuration supported against the aperture edge such that the peripheral sidewall configuration and the aperture edge cooperate in a way which converts at least a portion of a biasing force, that is applied generally normal to the opposing major surfaces of the window, to a direction that is different from, oblique to, or sloped with respect to an applied direction of the biasing force.
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Inventors:
DEVINE DANIEL J (US)
LEE YOUNG JAI (US)
LEE YOUNG JAI (US)
Application Number:
PCT/US2004/023351
Publication Date:
March 02, 2006
Filing Date:
July 21, 2004
Export Citation:
Assignee:
MATTSON TECH INC (US)
DEVINE DANIEL J (US)
LEE YOUNG JAI (US)
DEVINE DANIEL J (US)
LEE YOUNG JAI (US)
International Classes:
E06B7/00; E06B3/00; A47H
Foreign References:
| US2601148A | 1952-06-17 | |||
| US2576392A | 1951-11-27 |
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